»sµ{±±ºÞ¨t²Î (WIP)
«~½è±±ºÞ¨t²Î (SPC)
³]³ÆºÞ²z (EMS)
¹w¨¾«O¾i (EPM)
³]³Æ³s½u (EI)
 
°ò¦¥­¥x (FWC)
¥ø·~ª¾ÃѶì¼Ò (MDL)
¤u§@¬yµ{ºÞ²z (WFS)
¦h»y¨t³]©w (MLS)
 
 
 
 
 
 

³]³Æ³s½u(EI)
Equipment Interface System



MESSeries—û MES¸Ñ¨M¤è®×¤¤³]³Æ¾÷¥x³s½u¾ã¦X¥D­n³z¹LEI¡]Equipment Interface¡^¼Ò²Õ¶i¦æ¡AEI¼Ò²Õ´£¨ÑRS232¡BPLC¡BSECS»PFile¦hºØ¦¬¶°¸ê®Æªº¼Ò¦¡»P³]³Æ·¾³q¡A¦P®É¦¬¶°³]³Æ¤§ª¬ºA¡B²£¶q¤Î¿ù»~¥N½X¤Î¨ä¬ÛÃö¸ê®Æ¡A¨Ã±N³o¨Ç¸ê®Æ¦s©ñ¦b¨t²Î¤º´£¨Ñ³]³ÆºÞ²z¤Î¨ä¥¦¬ÛÃö¼Ò²Õ©Ò¨Ï¥Î¡C

 



MESSeries—û³]³Æ³s½u¾ã¦X¬[ºc¹Ï